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APPLICATION OF SILICALITE-1 FILM TO A SURFACE ACOUSTIC WAVE DEVICE SENSOR
Korean Journal of Chemical Engineering, September 1998, 15(5), 552-555(4), 10.1007/BF02707108
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Abstract
Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N2 flow containing vapors of water, acetone, and benzene, respectively. In creased for benzene, compared to that of the bare delay line.
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Amati D, Arn D, Blom N, Ehrat M, Saunois J, Widmer HM, Sens. Actuators B-Chem., 7, 587 (1992)
Battenberg A, Breidt VF, Vahrenkamp H, Sens. Actuators B-Chem., 30, 29 (1996)
Bein T, Brown K, Frye GC, Brinker J, J. Am. Chem. Soc., 111, 7640 (1989)
Chang SM, Tamiya E, Karube I, Sato M, Masuda Y, Sens. Actuators B-Chem., 5, 53 (1991)
Iwasaki A, Hirata M, Kudo L, Zeolites, 16, 35 (1996)
Kim MH, Jung MK, Rhee HK, Korean J. Chem. Eng., 12(4), 410 (1995)
Kim MH, Li HX, Davis ME, Microporous Mater., 1, 191 (1993)
Koegler JH, Zandbergen HW, Harteveld JLN, Nieuwenhuizen MS, Jansen JC, von Bekkum H, "Zeolites and Related Microporous Materials: State of the Art 1994, Studies in Surface Science and Catalysis, Vol. 84," Elsevier, Science B.V., 307 (1994)
Liron Z, Greenblatt J, Frishman G, Gratziani N, Sens. Actuators B-Chem., 12, 115 (1993)
Nieuwenhuizen MS, Harteveld JLN, Sens. Actuators B-Chem., 18-19, 502 (1994)
Ping W, Jun X, Sens. Actuators B-Chem., 37, 169 (1996)
Plog C, Manuz W, Kurzweil P, Sens. Actuators B-Chem., 24-25, 403 (1995)
Reinbold J, Buhlmann K, Cammann K, Wierig A, Wimmer C, Weber E, Sens. Actuators B-Chem., 18-19, 77 (1994)
Somov S, Reinhard G, Guth U, Gopel W, Sens. Actuators B-Chem., 35-36, 409 (1996)
Sun HT, Cheng TZ, Yao X, Sens. Actuators B-Chem., 13-14, 107 (1993)
Yuquan C, Wuming Z, Guang L, Sens. Actuators B-Chem., 20, 247 (1994)
