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Preparation of CHF3 Phasma Polymeric Composite Membrane and Characteristics of Surface Modification
Dept. of Chem. Eng., Dankook Univ., San 8, Hannam-dong, Yongsan-gu, Seoul 140-714, Korea
plasmasu@unitel.co.kr
Korean Journal of Chemical Engineering, January 2000, 17(1), 33-40(8), 10.1007/BF02789250
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Abstract
Low temperature rf-plasma was used to create a plasma-treated polymeric composite membrane made from CHF3, a material that is very thermally and chemically stable. The chemical and physical properties of the CHF3 plasma polymers were variously changed by plasma treatment on membrane surface. CHF3 plasma polymers were efficiently deposited on an aluminum oxide substrate with a pore size of 0.02㎛ at the plasma polymerization time 60 min, the rf-power 160W, and the flow rate of the CHF3 16 sccm. It was found that O2 plasma treatment had a much greater effect on the surface roughness of the CHF3 plasma polymer than did Ar or N2 plasma treatment. The attachment of functional groups to the CHF3 plasma polymer surface as a result of plasma treatment increased the intensity of the oxygen functional group peak. It also increased the oxygen content and the O/C ratio. The plasma treatment also made to the surface that became to hydrophilic. The most effective hydrophilic surface modification occurred when the composite parameter raged from 300-450 kJ·s/kg. It was confirmed that the gas permeability and selectivity changed as a result of crosslinking, chemical etching, and the importing of functional groups to the CHF3 plasma polymeric membrane.
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