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Received July 24, 2000
Accepted January 26, 2001
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Electrochemical Synthesis of Ba- and Sr-Based Titanate Thin Films using Ti Electrode Prepared by RF Sputtering
Department of Chemical Engineering, Inha University, Inchon 402-751, Korea
Korean Journal of Chemical Engineering, May 2001, 18(3), 297-302(6), 10.1007/BF02699168
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Abstract
Barium and strontium titanate films were electrochemically synthesized onto Ti thin film prepared by RF sputtering. Applied current waveform was modulated to investigate the film growth mechanism. Superimposed cathodic pulses accelerated the formation of titanate thin films, and both the electrode surface pH and (Ba(2+), Sr(2+)) ion size had a strong influence on film formation. Titanate film formation mechanism was investigated with a scanning electron microscope, an X-ray diffractometer and an electrochemical quartz crystal microbalance (EQCM). In-situ mass change of Ti electrode during electrolysis indicated that electrochemical method sets a limit to film growth.
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References
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Baumert BA, Chang LH, Matsuda AT, Tracy CJ, J. Mater. Res., 13, 197 (1998)
Bendale P, Venigalla S, Ambrose JR, Verink ED, Adair JH, J. Am. Ceram. Soc., 76, 2619 (1996)
Hoffmann T, Doll T, Fuenzalida VM, J. Electrochem. Soc., 144(11), L292 (1997)
Hori Y, Suzuki S, J. Electrochem. Soc., 130, 2390 (1983)
Kajiyoshi K, Hamaji Y, Tomono K, Kasanami T, Yoshimura M, J. Am. Ceram. Soc., 79, 613 (1996)
Kajiyoshi K, Tomono K, Hamaji Y, Kasanami T, Yoshimura M, J. Am. Ceram. Soc., 78, 1521 (1995)
Kajiyoshi K, Yoshimura M, Hamaji Y, Tomono K, Kasanami T, J. Mater. Res., 11, 169 (1996)
Othsuka T, Masuda M, Sato N, J. Electrochem. Soc., 132, 787 (1985)
Pasierb P, Komornicki S, Radecka M, Thin Solid Films, 324(1-2), 134 (1998)
Schaffer JP, Saxena A, Antolovich SD, Sanders TH, Warner SB, "The Science and Design of Engineering Materials," Richard D. Irwin, Inc., Chicago (1995)
Seo KW, Kong HG, Korean J. Chem. Eng., 17(4), 428 (2000)
Seo KW, Kong HG, Korean J. Chem. Eng., 17(4), 455 (2000)
Takeshima Y, Shiratsuyu K, Takagi H, Sakabe Y, Jpn. J. Appl. Phys., 36, 5870 (1997)
Tsuzuki A, Kato K, Kusumoto K, Torii Y, J. Mater. Sci., 33(12), 3055 (1998)
Venigalla S, Bendale P, Adair JH, J. Electrochem. Soc., 142(6), 2101 (1995)
Xu WP, Zheng L, Xin H, Lin C, J. Mater. Res., 11, 821 (1996)
Yoshimura M, Suchanek W, Watanabe T, Sakurai B, J. Mater. Res., 13, 875 (1998)
