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Received November 5, 2001
Accepted February 15, 2002
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Hybrid Treatment of Tetramethyl Ammonium Hydroxide Occurring from Electronic Materials Industry
Regional Research Center for Coastal Environments of Yellow Sea, Inha University, 253 Yong Hyun Dong, Nam Gu, Incheon 402-751, Korea 1Division of Environmental and Geosystem Engineering, Inha University, 253 Yong Hyun Dong, Nam Gu, Incheon 402-751, Korea
cgk@inha.ac.kr
Korean Journal of Chemical Engineering, May 2002, 19(3), 445-450(6), 10.1007/BF02697155
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Abstract
TMAH (tetramethyl ammonium hydroxide) originating from etching and photo-developing processes was treated with Fenton oxidation followed by an activated sludge. Additionally, a Microtox test was performed to address any potential toxicity of TMAH against mixed cultures of microorganisms in the activated sludge. The Microtox test revealed that toxicity of TMAH against Photobacterium phosphoreum was highly effective showing 5% of EC50, but its toxicity was completely dissipated showing 100% of EC50 being recovered after being treated with Fenton reagents. BOD5 test showed that acclimated cultures to TMAH could readily decompose TMAH in an order of magnitude higher than that of not-acclimated culture. Feasibility tests showed that TMAH was readily biodegraded after being oxidized by the Fenton process, while TMAH fed directly into the activated sludge was laggardly decomposed during longer adaptation period. In the presence of acetic acid, activity of acclimated mixed cultures to TMAH was considerably_x000D_
reduced by dominant presence of predators competitively utilizing acetic acid.
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