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Received March 21, 2002
Accepted May 14, 2002
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Characterization of Parylene Deposition Process for the Passivation of Organic Light Emitting Diodes
School of Chemical Engineering and Technology, Yeungnam University, 214-1 Dae-dong, Gyongsan 712-749, Korea
Korean Journal of Chemical Engineering, July 2002, 19(4), 722-727(6), 10.1007/BF02699324
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Abstract
The chemical vapor condensation process of Parylene-N thin films was investigated and applied to the passivation of the organic light emitting diodes (OLEDs). The effects of process variables on the deposition rate were studied, and it was found that the deposition rate of Parylene increases with increasing precursor sublimation temperature but decreases with increasing substrate temperature. The dependence of deposition rate was well explained by the condensation polymerization model of the monomer on the surface. The Parylene film was used as a passivation layer for OLEDs, and as a result, the lifetime of the passivated OLEDs was increased by a factor of about 2.3 compared with that of non-passivated OLEDs.
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References
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Han EM, Do LM, Yamamoto N, Fujihira M, Thin Solid Films, 273(1-2), 202 (1996)
Kim EJ, Kim SK, Park RH, Kim JT, HWAHAK KONGHAK, 36(6), 896 (1998)
McElvain J, Antoniadis H, Hueschen MR, Miller JN, Roitman DM, Sheatts JR, Moon RL, J. Appl. Phys., 80, 6022 (1996)
Szwarc M, Polym. Eng. Sci., 16, 473 (1976)
Tang CW, VanSlyke SA, Appl. Phys. Lett., 51, 913 (1987)
Yamashita T, Mori T, Mizutani T, J. Phys. D: Appl. Phys., 34, 740 (2001)
Yang GR, Ganguli S, Karcz J, Gill WN, Lu TM, J. Cryst. Growth, 183, 385 (1998)
