Articles & Issues
- Language
- English
- Conflict of Interest
- In relation to this article, we declare that there is no conflict of interest.
- Publication history
-
Received November 15, 2004
Accepted May 2, 2005
-
This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Copyright © KIChE. All rights reserved.
All issues
Fabrication of Submicron-Sized Copper Structures on Pre-Patterned Self-Assembled Monolayer and Langmuir-Blodgett Films
School of Chemical and Biological Engineering, Institute of Chemical Processes, Seoul National University, Seoul 151-742, Korea
Korean Journal of Chemical Engineering, July 2005, 22(4), 635-638(4), 10.1007/BF02706656
Download PDF
Abstract
The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.
References
Azzaroni O, Schilardi PL, Salvarezza RC, Electrochim. Acta, 48(20-22), 3107 (2003)
Choi I, Kim Y, Kim C, Kim J, Choi K, Yi J, Key Eng. Mater., 277-279, 903 (2004)
Jung YM, Ahn SJ, Kim ER, Lee H, J. Korean Phys. Soc., 40(4), 712 (2002)
Kojio K, Takahara A, Kajiyama T, Colloids Surf. A: Physicochem. Eng. Asp., 169, 295 (2000)
Lee JP, Sung MM, J. Am. Chem. Soc., 126(1), 28 (2004)
Lee KB, Kim DJ, Yoon KR, Kim Y, Choi IS, Korean J. Chem. Eng., 20(5), 956 (2003)
Liu S, Maoz R, Schmid G, Sagiv J, Nano Lett., 2(10), 1055 (2002)
Liu G, Xu S, Qian Y, Accounts Chem. Res., 33, 457 (2000)
Maoz R, Cohen SR, Sagiv J, Adv. Mater., 11(1), 55 (1999)
Maoz R, Frydman E, Cohen SR, Sagiv J, Adv. Mater., 12(6), 424 (2000)
Styrkas DA, Keddie JL, Lu JR, Su TJ, J. Appl. Phys., 85(2), 868 (1999)
Ulman A, An Introduction to Ultrathin Organic Films from Langmuir Blodgett to Self-Assembly, Academic press, London (1991)
Zhang M, Lenhert S, Wang M, Chi L, Lu N, Fuchs H, Ming N, Adv. Mater., 16(5), 409 (2004)
Choi I, Kim Y, Kim C, Kim J, Choi K, Yi J, Key Eng. Mater., 277-279, 903 (2004)
Jung YM, Ahn SJ, Kim ER, Lee H, J. Korean Phys. Soc., 40(4), 712 (2002)
Kojio K, Takahara A, Kajiyama T, Colloids Surf. A: Physicochem. Eng. Asp., 169, 295 (2000)
Lee JP, Sung MM, J. Am. Chem. Soc., 126(1), 28 (2004)
Lee KB, Kim DJ, Yoon KR, Kim Y, Choi IS, Korean J. Chem. Eng., 20(5), 956 (2003)
Liu S, Maoz R, Schmid G, Sagiv J, Nano Lett., 2(10), 1055 (2002)
Liu G, Xu S, Qian Y, Accounts Chem. Res., 33, 457 (2000)
Maoz R, Cohen SR, Sagiv J, Adv. Mater., 11(1), 55 (1999)
Maoz R, Frydman E, Cohen SR, Sagiv J, Adv. Mater., 12(6), 424 (2000)
Styrkas DA, Keddie JL, Lu JR, Su TJ, J. Appl. Phys., 85(2), 868 (1999)
Ulman A, An Introduction to Ultrathin Organic Films from Langmuir Blodgett to Self-Assembly, Academic press, London (1991)
Zhang M, Lenhert S, Wang M, Chi L, Lu N, Fuchs H, Ming N, Adv. Mater., 16(5), 409 (2004)
