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Received August 13, 2009
Accepted November 11, 2009
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Parylene-C thin films deposited on polymer substrates using a modified chemical vapor condensation method
School of Display and Chemical Engineering, Yeungnam University, Gyeongsan 712-749, Korea
Korean Journal of Chemical Engineering, March 2010, 27(3), 748-751(4), 10.1007/s11814-010-0165-z
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Abstract
The properties of parylene-C thin films deposited on polymer substrates using a modified chemical vapor condensation technique were investigated. The configuration of the polymerization chamber was altered from horizontal to vertical and designed with a circular symmetry in the z-direction to improve the deposition rate. The growth rate of the thin films was improved 2-5 times in a vertical configuration compared to a horizontal configuration. Potential_x000D_
factors responsible for such an improvement include the effect of coincidence between the flow direction of the gases and the direction of the convection in the reaction tube due to buoyancy. The synthesized films have a high transparency (>90%) in the visible region, a smooth surface morphology (Rs<5.0 nm), and amorphous phase structures with the presence of some crystalline domains.
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Gorham W, J. Ploy. Sci. Part A-1, 4, 3027 (1966)
Szwarc M, Discussions Faraday Soc., 2, 46 (1947)
Szwarc M, J. Polym. Sci., 6, 319 (1951)
Szwarc M, J. Chem. Phys., 16, 128 (1948)
d’Agostino R, Plasma deposition, treatment, and etching of polymers, Academic Press, New York (1990)
Mitu B, Bauer-Gogonea S, Leonhartsberger H, Lindner M, Bauer S, Dinescu G, Surface Coatings Technology, 174-175, 124 (2003)
Goschel U, Walter H, Langmuir, 16(6), 2887 (2000)
Chapman B, Glow discharge processes, John Wiley & Sons, New York, 13-14 (1980)
Hwang JY, Park C, Huang M, Anderson T, J. Cryst. Growth, 279(3-4), 521 (2005)
Callahan RRA, Pruden KG, Raupp GB, Beaudoin SP, J. Vac. Sci. Technol. B, 21(4), 1496 (2003)
Beraa M, Rivatona A, Gandonb C, Gardettea JL, European Polymer Journal, 36, 1765 (2000)
