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Received August 16, 2013
Accepted December 13, 2013
- This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
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Plasma-polymerized n-hexane and its utilization as multilayer moisture-barrier film with aluminum oxide
School of Chemical Engineering, Sungkyunkwan University, Suwon 440-746, Korea
sungmcho@skku.edu
Korean Journal of Chemical Engineering, March 2014, 31(3), 528-531(4), 10.1007/s11814-013-0278-2
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Abstract
Organic-inorganic multilayer structures were prepared for a moisture barrier. As the organic polymer and inorganic layers, plasma-polymerized n-hexane and aluminum-oxide layers were utilized, respectively. The plasma polymerization of n-hexane was confirmed by the appearance of carbon double bonds in the produced polymer layer. The organic and inorganic layers were prepared sequentially in vacuum, and the repeated growth sequence produced the multilayer structures. The organic-inorganic multilayer structures show about 35% better moisture-barrier property than those obtained from individual organic and inorganic layers.
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Carcia PF, McLean RS, Reilly MH, Groner MD, George SM, Appl. Phys. Lett., 89, 031915 (2006)
Carcia PF, McLean RS, Reilly MH, Appl. Phys. Lett., 97, 221901 (2010)
Seo SW, Chae H, Seo SJ, Chung HK, Cho SM, Appl. Phys. Lett., 102, 161908 (2013)
Park JS, Chae H, Chung HK, Lee SI, Semicond. Sci. Technol., 26, 034001 (2011)
Seo SW, Chae H, Seo SJ, Chung HK, Cho SM, Appl. Phys. Lett., 102, 161908 (2013)
Park JS, Chae H, Chung HK, Lee SI, Semicond. Sci. Technol., 26, 034001 (2011)
Kramer P, Sharma AK, Hennecke EE, Yasuda H, J. Polym. Sci., 22, 475 (1984)
Ozaydin-Ince G, Coclite AM, Gleason KK, Rep. Prog. Phys., 75, 016501 (2012)
Gengenbach TR, Vasic ZR, Chatelier RC, Griesser HJ, J. Polym. Sci. A: Polym. Chem., 32(8), 1399 (1994)
Bae IS, Jung CK, Cho SJ, Song YH, Boo JH, J. Alloys. Comp., 449, 393 (2008)
Fang J, Chen H, Yu X, J. Appl. Polym. Sci., 80, 1434 (2001)
Korner L, Sonnenfeld A, Heuberger R, Waller JH, Leterrier Y, Manson JAE, von Rohr PR, J. Phys. D: Appl. Phys., 43, 115301 (2010)
Gok A, Oksuz L, J. Macromol. Sci. A: Pure. Appl. Chem., 44, 1095 (2007)
Kim K, Jeon BJ, Jung I, Korean J. Chem. Eng., 17, 33 (2000)
Sohn WI, Koo JK, Oh SJ, Korean J. Chem. Eng., 17(6), 678 (2000)
Seo SW, Jung E, Chae H, Cho SM, Org. Electron., 13, 2436 (2012)