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Received June 10, 2013
Accepted December 8, 2013
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Economic analysis of waste recycle process in perhydropolysiloxazane synthesis
Department of Chemical and Biological Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, Korea
Korean Journal of Chemical Engineering, May 2014, 31(5), 748-753(6), 10.1007/s11814-013-0268-4
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Abstract
The perhydropolysiloxazane (PHPS) solution has been widely used in the spin-on-dielectric(SOD) process to form silicon oxide layer on a wafer in semiconductor industries. To reduce the whole semiconductor manufacturing cost, the process of PHPS solution production requires high productivity as well as low production cost. A large portion of the PHPS solution production cost is attributed to the large usage of solvents (pyridine and xylene), because more than 20 times of solvents in mass are required to produce a unit mass of high purity PHPS solution. Therefore, we suggest several plausible solvent regeneration processes of organic solvent waste from the PHPS solution production, and their economics is evaluated for comparison.
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O’Sullivan A, Sheffrin SM, Economics: Principles in Action, Pearson Prentice Hall, USA (2003)
Hazeltine B, Bull C, Field guide to appropriate technology, Academic Press, USA (2003)
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Park YM, Kang HW, Kim YH, Theories Appl. Chem. Eng., 12, 1510 (2006)
Agrawal R, Fidkowski ZT, AIChE J., 44(11), 2565 (1998)
Nikoo MB, Mahinpey N, Biomass Bioenerg., 32(12), 1245 (2008)
Peters M, Timmerhaus K, West R, Plant design and economics for chemical engineers, McGraw-Hill, USA (2002)
Wang SJ, Wong DSH, Chem. Eng. Sci., 62(4), 1010 (2007)
Page JS, Conceptual cost estimating manual, Gulf Professional Publishing, USA (1996)
