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Received August 13, 2016
Accepted October 24, 2016
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This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
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Organic/inorganic multilayer thin film encapsulation via initiated chemical vapor deposition and atomic layer deposition for its application to organic solar cells
Department of Chemical & Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Korea 1Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Korea
sgim@kaist.ac.kr
Korean Journal of Chemical Engineering, March 2017, 34(3), 892-897(6), 10.1007/s11814-016-0303-3
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Abstract
A thin film encapsulation (TFE) was fabricated by alternating deposition of organic and inorganic layers via initiated chemical vapor deposition (iCVD) and atomic layer deposition (ALD). A highly crosslinked organosilicone polymer, poly(1,3,5-trimethyl-1,3,5-trivinylcyclotrisiloxane) (pV3D3) was successfully adopted as the organic layer for the fabrication of TFE. The film formed a stable and smooth interface with ALD Al2O3 layer. The multilayer TFE consisting of pV3D3 and Al2O3 alternating layers exhibited outstanding optical transparency as well as excellent barrier property. Finally, the multilayer TFE was applied monolithically to organic solar cells (OSCs), and the shelf life of the cells was increased immensely, suggesting that the developed organic/inorganic multilayer TFE is an efficient barrier film for elongating the lifetime of organic electronics.
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References
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Kim SY, Kim BJ, Kim DH, Im SG, RSC Adv., 5, 68485 (2015)
George SM, Chem. Rev., 110(1), 111 (2010)
Spee DA, Schipper MR, van der Werf CHM, Rath JK, Schropp REI, Thin Solid Films, 532, 84 (2013)
Coclite AM, Ozaydin-Ince G, Palumbo F, Milella A, Gleason KK, Plasma Process Polym., 7, 561 (2010)
Barr MC, Rowehl JA, Lunt RR, Xu J, Wang A, Boyce CM, Im SG, Bulovic V, Gleason KK, Adv. Mater., 23, 3499 (2011)
Pak K, Seong H, Choi J, Hwang WS, Im SG, Adv. Funct. Mater., DOI:10.1002/adfm.201602585. (2016)
Bertrand JA, George SM, J. Vac. Sci. Technol. A, 31, 01A122 (2013)
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Carcia PF, McLean RS, Reilly MH, Groner MD, George SM, Appl. Phys. Lett., 89, 031915 (2006)
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Graff GL, Williford RE, Burrows PE, J. Appl. Phys., 96, 1840 (2004)
Coyle DJ, Prog. Photovolt.: Res. Appl., 21, 156 (2013)
Han D, Lee H, Jeong S, Lee J, Lee JY, Yoo S, Org. Electron., 25, 31 (2015)
Voroshazi E, Verreet B, Buri A, Muller R, Di Nuzzo D, Heremans P, Org. Electron., 12, 736 (2011)
