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Received June 2, 2021
Accepted August 1, 2021
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This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
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Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment
School of Materials Science and Engineering, Yeungnam University, Gyeongsan 38541, Korea
Korean Journal of Chemical Engineering, December 2021, 38(12), 2541-2548(8), 10.1007/s11814-021-0915-0
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Abstract
Semiconductor and display production equipment requires highly plasma-resistant components, where α-Al2O3 plays a vital role in shielding and insulating. In the present study, the physicochemical properties of a new domestic α-Al2O3 powder were compared with those of imported ones currently used in the Korean industry. The particle size distribution revealed finer particles in the domestic powder that were generated during dry milling than the imported powder resulting in a broad size distribution and high surface area. An effort was made to eliminate the fine particles by heat treatment because they increase the viscosity of a slurry for wet processing and induce a low green and sintered density of the final products. In addition to the effects of heat treatment on the powder characteristics, the dispersion behavior of an aqueous Al2O3 slip was examined systematically upon the addition of each polymeric processing additive for filter pressing.
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Lallemant L, Fantozzi G, Garnier V, Bonnefont G, J. European Ceram. Soc., 32, 2909 (2012)
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