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고밀도 플라즈마 발생장치 2차원 모델링
Two-Dimensional Modeling of High-Density Plasma Source
아주대학교 화학공학과 1St. Petersburg State Technical University Physical Technical Dept.
Dept. of Chem. Eng.,, Ajou University, Korea 1Physical Technical Dept., St. Petersburg State Technical University, Korea
cbshin@madang.ajou.ac.kr
HWAHAK KONGHAK, February 2001, 39(1), 23-29(7), NONE
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Abstract
고밀도 플라즈마 발생장치의 해석을 위하여 2차원 유체 모델링을 수행하였다. 모델에서는 플라즈마 전달현상, 중성입자 동력학, 기체 유동, 열전달 및 외부로부터 공급되는 동력의 영향이 모두 포함되었다. 다성분계의 전달 현상에 대한 지배방정식은 유도 결합 동력의 분포를 구하기 위한 Maxwell 방정식과 연립하여 해를 구하였다. 이 모델을 헬리컬 공진기 염소 플라즈마 발생장치에 적용하여 반응기 압력, 기체 유량 및 공급된 동력이 플라즈마 밀도 및 전자 온도에 미치는 영향을 검토하였다.
A two-dimensional fluid modeling was performed for the analysis of the high-density plasma source. The model coupled plasma transport, neutral species dynamics, gas flow, heat transfer, and plasma power coupling from an external source. The governing equations for multicomponent transport system were solved along with Maxwell's equations for inductively coupled power deposition. The model was applied to a chlorine discharge in the plasma source chamber of helical resonator. The effects of reactor pressure, gas flow rate, and deposited power on the plasma density and the electron temperature were examined.
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