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Received April 28, 2003
Accepted February 24, 2004
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졸-겔 공정으로 제조한 Al/Nb2O5 캐패시터의 특성 분석
The Characterization of Al/Nb2O5 Capacitors Prepared by Sol-Gel Process
중앙대학교 화학공학과, 156-756 서울시 동작구 흑석동 221
Department of Chemical Engineering, Chung-Ang University, 221, Huksuk-dong, Dongjak-gu, Seoul 156-756, Korea
kjg8787@hanmail.net
Korean Chemical Engineering Research, April 2004, 42(2), 257-261(5), NONE Epub 14 May 2004
Abstract
졸-겔 공정을 통하여 기존의 Al2O3 대비 유전율이 높으면서 알루미늄의 융점 이하 온도에서 결정화가 가능한 Nb2O5를 알루미늄 에칭박 위에 코팅하여 Al/Nb2O5 전극을 제조하였다. 니오븀에톡시드, 에탄올, 초산, 디에탄올아민, 증류수의 몰비율이 1 : 80 : 0.5 : 1.5 : 1.5일 때 안정하고 균질한 졸을 얻을 수 있었다. Al/Nb2O5 전극의 물리적 및 전기적 특성을 측정하였으며, 동일한 내전압을 기준으로 전기화학적 양극산화로 제조한 Al/Al2O3 전극과 그 특성을 비교하였다. Al/Nb2O5 전극의 특성은 열처리 온도, 열처리 시간, 코팅횟수에 의존하였다. 16 V 내전압을 기준으로 Al/Nb2O5박이 Al/Al2O3박에 비하여 28.3% 정도 우수한 CV적을 나타냈으나 누설전류는 다소 열등하였다.
Al/Nb2O5 electrode was prepared by sol-gel process using dip-coating method. Nb2O5 being higher dielectric constance than Al2O3 and being able to be crystallized below the melting point of aluminum was coated on aluminum etched foil. A stable and uniform sol solution was obtained with the mole ratio of 1 : 80 : 0.5 : 1.5 : 1.5-niobium ethoxide : ethyl alcohol : acetic acid : diethanol amine : distilled water. The physical and electrical characteristics of the Al/Nb2O5 electrode were evaluated and then were compared with those of Al/Al2O3 electrode anodized electrochemically. The characteristics of Al/Nb2O5 electrode depended on a calcination temperature, a calcination time and the number of coating times. On the basis of 16 V withstanding voltage, Al/Nb2O5 electrode was 28.3% higher C·V product than that of Al/Al2O3 but was inferior leakage current to the Al/Al2O3 electrode.
Keywords
References
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Kudoh Y, Nishino A, Electrochemistry, 69(6), 397 (2001)
GTP, The Latest Condenser Technology and Material-86, GTP, Tokyo (1985)
Kim J, Cho S, Min H, Choi J, Hwang K, J. Korean Ind. Eng. Chem., 11(5), 535 (2000)
Watanabe K, Hirai S, Electrochemistry, 69(6), 407 (2001)
Lai GC, Preparation of Thin Film Having High Capacitance and its Electric Characteristics, Tokyo Aluminium (1997)
Lai GC, J. Ceram. Soc. Jpn., 107(12), 1221 (1999)
Shikanai M, Sakairi M, Takahashi H, Seo M, Takahiro K, Nagata S, Yamaguchi S, J. Electrochem. Soc., 144(8), 2756 (1997)
Davis GD, Moshier WC, Fritz TL, Cote GO, J. Electrochem. Soc., 137(2), 422 (1990)
Kukli K, Ritala M, Leskela M, J. Electrochem. Soc., 148(2), F35 (2001)
Brinker CJ, Sol-Gel Science, Academic Press, Inc. (1990)
Pierre AC, Introduction to Sol-Gel Processing, Kluwer Academic Publishers (1998)
