Articles & Issues
- Language
- korean
- Conflict of Interest
- In relation to this article, we declare that there is no conflict of interest.
- Publication history
-
Received April 5, 2004
Accepted April 6, 2004
-
This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
Copyright © KIChE. All rights reserved.
All issues
마이크로플루이딕 시스템의 현황
Microfluidic Systems: State of the Art
한국과학기술원 생명화학공학과, 초미세화학공정시스템연구센터, 305-701 대전시 유성구 구성동 373-1
Department of Chemical and Biomolecular Engineering, and Center for Ultramicrochemical Process Systems, Korea Advanced Institute of Science and Technology, 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea
Korean Chemical Engineering Research, August 2004, 42(4), 375-386(12), NONE Epub 14 September 2004
Abstract
마이크로스케일에서 유체를 다루는 마이크로플루이딕 시스템은 화학, 생물 분야에서 재료 분야에 이르기까지 널리 사용되고 있다. 이에 대한 이해를 돕기 위하여 마이크로플루이딕스의 유체역학적 특성을 살펴보고, 마이크로플루이딕 시스템에서 유체의 흐름을 제어하는 기본 소자 중 마이크로밸브와 마이크로펌프에 대하여 소개한다. 그리고 마이크로 플루이딕 시스템의 제작 기술과 전산모사를 위한 상용 소프트웨어를 검토하고, 마이크로플루이딕 시스템이 적용되는 분야를 간단히 소개한다.
Microfluidic systems for manipulating fluids in the micro scale are widely used in scientific areas ranging from chemistry, biology to material science. In this article, fluid mechanical characteristics of microfluidic system are examined and microvalves and micropumps for microfluidic systems are introduced. Then, methods for fabricating microfludic systems and the availability of commercial software for the simulation of microfluidic system are reviewed._x000D_
Examples of applications of microfluidc systems in various areas are shown briefly.
References
Bassous E, Taub HH, Kuhn L, Appl. Phys. Lett., 31(2), 135 (1977)
Petersen KE, IEEE Trans. Electron Devices, ED-26(12), 1918 (1979)
Terry SC, Jerman JH, Angell JB, IEEE Trans. Electron Devices, ED-26(12), 1880 (1979)
van Lintel HTG, Van de Pol FCM, Bouwstra S, Sens. Actuators, 15(2), 153 (1988)
van de Pol FCM, Wonnink DGJ, Elwenspoek M, Fluitman JHJ, Sens. Actuators, 17(1-2), 139 (1989)
Esachi M, Shoji S, Nakano A, Sens. Actuators, 20(1-2), 163 (1989)
Esachi M, Shoji S, Nakano A, Sens. Actuators A-Phys., 21(2), 163 (1989)
van de Pol FCM, van Lintel HTG, Elwenspoek M, Fluitman JHJ, Sens. Actuators A-Phys., 21(2), 198 (1990)
Smits JG, Sens. Actuators A-Phys., 21(3), 203 (1990)
Shoji S, Esachi M, Matsuo T, Sens. Actuators, 14(2), 101 (1988)
Esashi M, Sens. Actuators A-Phys., 21(1-3), 161 (1990)
Manz A, Graber N, Widmer HM, Sens. Actuators B-Chem., 1(1-6), 244 (1990)
Kamholz AE, Lab Chip, 4(2), 16N (2004)
Burns MA, Johnson BN, Brahmasandra SN, Handique K, Webster JR, Krishnan M, Sammarco TS, Man PM, Jones D, Heldsinger D, Mastrangelo CH, Burke DT, Science, 282(5388), 484 (1998)
Kim DH, News Inf. Chem. Eng., 21(5), 567 (2003)
Thorsen T, Maerkl SJ, Quake SR, Science, 298(5593), 580 (2002)
Stone HA, Strook AD, Ajdari A, Annu. Rev. Fluid Mech., 36, 381 (2004)
Zhao B, Moore JS, Beebe DJ, Science, 291(5506), 1023 (2001)
Vinogradova OI, Int. J. Miner. Process., 56(1), 31 (1999)
Cottin-Bizzone C, Jurine S, Baudry J, Crassous J, Resagno F, Charlaix E, Eur. Phys. J. E, 9(1), 47 (2002)
Lauga E, Stone HA, J. Fluid Mech., 489, 55 (2003)
Pit R, Hervet H, Leger L, Phys. Rev. Lett., 85(5), 980 (2000)
Sharp KV, Adrian RJ, Santiago JG, Molho JI, "Liquid Flow in Microchannels," in MEMS Handbook, Gad-el-Hak, M., ed., CRC Press, Boca Raton, FL (2001)
Zhu YX, Granick S, Phys. Rev. Lett., 88(10) (2002)
Schomburg WK, Fahrenberg J, Maas D, Rapp R, J. Micromech. Microeng., 3(4), 216 (1993)
Shoji S, Esashi M, J. Micromech. Microeng., 4(4), 157 (1994)
Sato K, Shikida M, J. Micromech. Microeng., 4(4), 205 (1994)
Robertson J, Wise KD, Sens. Actuators A-Phys., 71(1-2), 98 (1998)
Wijngaart W, Ask H, Enoksson P, Stemme G, Sens. Actuators A-Phys., 100(2-3), 264 (2002)
Watanabe T, Kuwano H, Microsyst. Technol., 3(3), 107 (1997)
Stehr M, Messner S, Sandmaier H, Zangerle R, Sens. Actuators A-Phys., 57(2), 153 (1996)
Jackson WC, Tran HD, O'Brien MJ, Rabinovich E, Lopez GP, J. Vac. Sci. Technol. B, 19(2), 596 (2001)
Puntambekar A, Choi JW, Ahn CH, Kim S, Makhijani VB, Lab Chip, 2(4), 213 (2002)
Low LM, Seetharaman S, He KQ, Madou MJ, Sens. Actuators B-Chem., 67(1-2), 149 (2000)
Yu Q, Bauer J, Moore J, Beebe D, Appl. Phys. Lett., 78(17), 2589 (2001)
Koch M, Evans A, Brunnschweiler A, J. Micromech. Microeng., 8(2), 119 (1998)
Cao L, Mantell S, Polla D, Sens. Actuators A-Phys., 94(1-2), 117 (2001)
Jeon N, Chiu D, Wargo C, Wu H, Choi I, Anderson J, Whitesides GM, Biomedical Microdevices, 4(2), 117 (2002)
Xu D, Wang L, Ding G, Zhou Y, Yu A, Cai B, Sens. Actuators A-Phys., 93(1), 87 (2001)
Makino E, Mitsuya T, Shibata T, Sens. Actuators A-Phys., 88(3), 256 (2001)
Andersson H, Wijngaart W, Nilsson P, Enoksson P, Stemme G, Sens. Actuators B-Chem., 72(3), 259 (2001)
Probestein RF, Physicochemical Hydrodynamics: An Introduction, 2nd ed., John Wiley & Sons, New York, NY (1994)
Fuhr G, Schnelle T, Wagner B, J. Micromech. Microeng., 4(4), 217 (1994)
Jang J, Lee S, Sens. Actuators A-Phys., 80(1), 84 (2000)
Lemoff A, Lee AP, Sens. Actuators B-Chem., 63(3), 178 (2000)
Nagakura T, Ishihara K, Furukawa T, Masuda K, Tsuda T, Sens. Actuators B-Chem., 34(1), 229 (1966)
Effenhauser C, Harttig H, Kramer P, Biomedical Devices, 4(1), 27 (2002)
Whitesides GM, Ostuni E, Takayama S, Jiang X, Ingber DE, Annu. Rev. Biomed. Eng., 3, 335 (2001)
Ziaie B, Baldi A, Lei M, Gu Y, Siegel RA, Adv. Drug Deliv. Rev., 56(2), 145 (2004)
Madou MJ, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed., CRC Press, Boca Raton, Fl (2002)
Gad-el-Hak, (Ed.), The MEMS Handbook, CRC Press, Boca Raton, Fl (2002)
Xia Y, Whitesides GM, Annu. Rev. Mater. Sci., 28, 153 (1998)
McDonald JC, Duffy DC, Anderson JR, Chiu DT, Wu H, Schueller OJA, Whitesides GM, Electrophoresis, 21(1), 27 (2000)
Sia SK, Whitesides GM, Electrophoresis, 24(21), 3563 (2003)
Bushan B, (Ed.), Springer Handbook of Nanotechnology, Springer, Berlin (2004)
Whitesides GM, Strook AD, Phys. Today, 54(6), 42 (2001)
Quake SR, Scherer A, Science, 290(5496), 1536 (2000)
Becker H, Heim U, "Silicon as Tool Material for Polymer hot Embossing,"Proc. 12th IEEE Int. Conf. on MEMS '99, Orlando, 228 (1999)
Lee GB, Chen SC, Huang GR, Sung WC, Lin YH, Sens. Actuators B-Chem., 75(1), 142 (2001)
Beebe DJ, Moore JS, Liu Q, Liu RH, Devadoss BH, Proc. Natl. Acad. Sci., 97(25), 13488 (2000)
CFD-ACE+(ver.6.6)(trademark of CFE Research Corporation), CFD Research Corporation, Huntsville, AL, USA, 2001; soft-ware, manuals and support, http://www.cfdrc.com (2001)
CoventorWare™(ver.2001.3), COVENTOR Inc., Cary, NC, USA, 2001; software, manuals and support, http://www.coventor.com
Goranovic G, Bruus H, "Simulation in Microfluidies," Chap. 5 in Microsystem Engineering of Lab-on-a-chip Devices, Eds. Geschke, O., Klank, H. and Tellman, P., Wiley-VCH Verlag, Weinheim (2004)
van Den Berg A, Bergveld P, (Eds.), Proc. μTAS '94 Workshop, Twente, 1994, Kluwer, Dordrecht (1995)
Harrison DJ, van Den Berg A, (Eds.), Proc. μTAS '98 Workshop, Banff, 1998, Kluwer, Dordrecht (1998)
van Den Berg A, Olthuis W, Bergveld P, (Eds.), Proc. μTAS 2000 Symposium, Enschde, 2000. Kluwer, Dordrecht (2000)
Ramsey JM, van Den Berg A, (Eds.), Proc. μTAS 2001 Symposium, Monterey, CA, 2001. Kluwer, Dordrecht (2001)
Baba Y, Shoji S, van Den Berg A, (Eds.), Proc. μTAS 2002 Symposium, Nara, 2002. Kluwer, Dordrecht (2002)
Nothrup MA, Jensen KF, Harrison DJ, (Eds.), Proc. μTAS 2003 Seventh Intl. Conference on Micro Total Analysis Systems, Squaw Valley, CA, 2003. Kluwer, Dordrecht (2003)
Reyes DR, Iossifidis D, Auroux PA, Manz A, Anal. Chem., "Micro Total Analysis Systems. 1. Introduction, Theory, and Technology", 74(12), 2623 (2002)
Auroux PA, Iossifidis D, Reyes DR, Manz A, Anal. Chem., "Micro Total Analysis Systems. 2. Analytical Standard Operations and Applications,", 74(12), 2637 (2002)
Jensen KF, AIChE J., 45(10), 2051 (1999)
Wang PC, DeVoe DL, Lee CS, Elctrophoresis, 22(18), 3857 (2001)
Beebe DJ, Mensing GA, Walker GM, Annu. Rev. Biomed. Eng., 4, 261 (2002)
Erickson D, Li D, Anal. Chim. Acta, 507(1), 11 (2004)
Barry R, Ivanov D, J. Nanobiotech., 2(2), 2 (2004)
Andeson H, Van den Berg A, Sens. Actuators B-Chem., 92(3), 315 (2003)
Andeson H, van den Berg A, Lab Chip, 4(2), 98 (2004)
Yi GR, Thorsen T, Manoharan VN, Hwang MJ, Jeon SJ, Pine DJ, Quake SR, Yang SM, Adv. Mater., 15(15), 1300 (2003)
Miguez H, Yang SM, Ozina GA, Appl. Phys. Lett., 81(14), 2493 (2002)
Chabinyc ML, Wong WS, Paul KE, Street RA, Adv. Mater., 15(22), 1903 (2003)
Petersen KE, IEEE Trans. Electron Devices, ED-26(12), 1918 (1979)
Terry SC, Jerman JH, Angell JB, IEEE Trans. Electron Devices, ED-26(12), 1880 (1979)
van Lintel HTG, Van de Pol FCM, Bouwstra S, Sens. Actuators, 15(2), 153 (1988)
van de Pol FCM, Wonnink DGJ, Elwenspoek M, Fluitman JHJ, Sens. Actuators, 17(1-2), 139 (1989)
Esachi M, Shoji S, Nakano A, Sens. Actuators, 20(1-2), 163 (1989)
Esachi M, Shoji S, Nakano A, Sens. Actuators A-Phys., 21(2), 163 (1989)
van de Pol FCM, van Lintel HTG, Elwenspoek M, Fluitman JHJ, Sens. Actuators A-Phys., 21(2), 198 (1990)
Smits JG, Sens. Actuators A-Phys., 21(3), 203 (1990)
Shoji S, Esachi M, Matsuo T, Sens. Actuators, 14(2), 101 (1988)
Esashi M, Sens. Actuators A-Phys., 21(1-3), 161 (1990)
Manz A, Graber N, Widmer HM, Sens. Actuators B-Chem., 1(1-6), 244 (1990)
Kamholz AE, Lab Chip, 4(2), 16N (2004)
Burns MA, Johnson BN, Brahmasandra SN, Handique K, Webster JR, Krishnan M, Sammarco TS, Man PM, Jones D, Heldsinger D, Mastrangelo CH, Burke DT, Science, 282(5388), 484 (1998)
Kim DH, News Inf. Chem. Eng., 21(5), 567 (2003)
Thorsen T, Maerkl SJ, Quake SR, Science, 298(5593), 580 (2002)
Stone HA, Strook AD, Ajdari A, Annu. Rev. Fluid Mech., 36, 381 (2004)
Zhao B, Moore JS, Beebe DJ, Science, 291(5506), 1023 (2001)
Vinogradova OI, Int. J. Miner. Process., 56(1), 31 (1999)
Cottin-Bizzone C, Jurine S, Baudry J, Crassous J, Resagno F, Charlaix E, Eur. Phys. J. E, 9(1), 47 (2002)
Lauga E, Stone HA, J. Fluid Mech., 489, 55 (2003)
Pit R, Hervet H, Leger L, Phys. Rev. Lett., 85(5), 980 (2000)
Sharp KV, Adrian RJ, Santiago JG, Molho JI, "Liquid Flow in Microchannels," in MEMS Handbook, Gad-el-Hak, M., ed., CRC Press, Boca Raton, FL (2001)
Zhu YX, Granick S, Phys. Rev. Lett., 88(10) (2002)
Schomburg WK, Fahrenberg J, Maas D, Rapp R, J. Micromech. Microeng., 3(4), 216 (1993)
Shoji S, Esashi M, J. Micromech. Microeng., 4(4), 157 (1994)
Sato K, Shikida M, J. Micromech. Microeng., 4(4), 205 (1994)
Robertson J, Wise KD, Sens. Actuators A-Phys., 71(1-2), 98 (1998)
Wijngaart W, Ask H, Enoksson P, Stemme G, Sens. Actuators A-Phys., 100(2-3), 264 (2002)
Watanabe T, Kuwano H, Microsyst. Technol., 3(3), 107 (1997)
Stehr M, Messner S, Sandmaier H, Zangerle R, Sens. Actuators A-Phys., 57(2), 153 (1996)
Jackson WC, Tran HD, O'Brien MJ, Rabinovich E, Lopez GP, J. Vac. Sci. Technol. B, 19(2), 596 (2001)
Puntambekar A, Choi JW, Ahn CH, Kim S, Makhijani VB, Lab Chip, 2(4), 213 (2002)
Low LM, Seetharaman S, He KQ, Madou MJ, Sens. Actuators B-Chem., 67(1-2), 149 (2000)
Yu Q, Bauer J, Moore J, Beebe D, Appl. Phys. Lett., 78(17), 2589 (2001)
Koch M, Evans A, Brunnschweiler A, J. Micromech. Microeng., 8(2), 119 (1998)
Cao L, Mantell S, Polla D, Sens. Actuators A-Phys., 94(1-2), 117 (2001)
Jeon N, Chiu D, Wargo C, Wu H, Choi I, Anderson J, Whitesides GM, Biomedical Microdevices, 4(2), 117 (2002)
Xu D, Wang L, Ding G, Zhou Y, Yu A, Cai B, Sens. Actuators A-Phys., 93(1), 87 (2001)
Makino E, Mitsuya T, Shibata T, Sens. Actuators A-Phys., 88(3), 256 (2001)
Andersson H, Wijngaart W, Nilsson P, Enoksson P, Stemme G, Sens. Actuators B-Chem., 72(3), 259 (2001)
Probestein RF, Physicochemical Hydrodynamics: An Introduction, 2nd ed., John Wiley & Sons, New York, NY (1994)
Fuhr G, Schnelle T, Wagner B, J. Micromech. Microeng., 4(4), 217 (1994)
Jang J, Lee S, Sens. Actuators A-Phys., 80(1), 84 (2000)
Lemoff A, Lee AP, Sens. Actuators B-Chem., 63(3), 178 (2000)
Nagakura T, Ishihara K, Furukawa T, Masuda K, Tsuda T, Sens. Actuators B-Chem., 34(1), 229 (1966)
Effenhauser C, Harttig H, Kramer P, Biomedical Devices, 4(1), 27 (2002)
Whitesides GM, Ostuni E, Takayama S, Jiang X, Ingber DE, Annu. Rev. Biomed. Eng., 3, 335 (2001)
Ziaie B, Baldi A, Lei M, Gu Y, Siegel RA, Adv. Drug Deliv. Rev., 56(2), 145 (2004)
Madou MJ, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed., CRC Press, Boca Raton, Fl (2002)
Gad-el-Hak, (Ed.), The MEMS Handbook, CRC Press, Boca Raton, Fl (2002)
Xia Y, Whitesides GM, Annu. Rev. Mater. Sci., 28, 153 (1998)
McDonald JC, Duffy DC, Anderson JR, Chiu DT, Wu H, Schueller OJA, Whitesides GM, Electrophoresis, 21(1), 27 (2000)
Sia SK, Whitesides GM, Electrophoresis, 24(21), 3563 (2003)
Bushan B, (Ed.), Springer Handbook of Nanotechnology, Springer, Berlin (2004)
Whitesides GM, Strook AD, Phys. Today, 54(6), 42 (2001)
Quake SR, Scherer A, Science, 290(5496), 1536 (2000)
Becker H, Heim U, "Silicon as Tool Material for Polymer hot Embossing,"Proc. 12th IEEE Int. Conf. on MEMS '99, Orlando, 228 (1999)
Lee GB, Chen SC, Huang GR, Sung WC, Lin YH, Sens. Actuators B-Chem., 75(1), 142 (2001)
Beebe DJ, Moore JS, Liu Q, Liu RH, Devadoss BH, Proc. Natl. Acad. Sci., 97(25), 13488 (2000)
CFD-ACE+(ver.6.6)(trademark of CFE Research Corporation), CFD Research Corporation, Huntsville, AL, USA, 2001; soft-ware, manuals and support, http://www.cfdrc.com (2001)
CoventorWare™(ver.2001.3), COVENTOR Inc., Cary, NC, USA, 2001; software, manuals and support, http://www.coventor.com
Goranovic G, Bruus H, "Simulation in Microfluidies," Chap. 5 in Microsystem Engineering of Lab-on-a-chip Devices, Eds. Geschke, O., Klank, H. and Tellman, P., Wiley-VCH Verlag, Weinheim (2004)
van Den Berg A, Bergveld P, (Eds.), Proc. μTAS '94 Workshop, Twente, 1994, Kluwer, Dordrecht (1995)
Harrison DJ, van Den Berg A, (Eds.), Proc. μTAS '98 Workshop, Banff, 1998, Kluwer, Dordrecht (1998)
van Den Berg A, Olthuis W, Bergveld P, (Eds.), Proc. μTAS 2000 Symposium, Enschde, 2000. Kluwer, Dordrecht (2000)
Ramsey JM, van Den Berg A, (Eds.), Proc. μTAS 2001 Symposium, Monterey, CA, 2001. Kluwer, Dordrecht (2001)
Baba Y, Shoji S, van Den Berg A, (Eds.), Proc. μTAS 2002 Symposium, Nara, 2002. Kluwer, Dordrecht (2002)
Nothrup MA, Jensen KF, Harrison DJ, (Eds.), Proc. μTAS 2003 Seventh Intl. Conference on Micro Total Analysis Systems, Squaw Valley, CA, 2003. Kluwer, Dordrecht (2003)
Reyes DR, Iossifidis D, Auroux PA, Manz A, Anal. Chem., "Micro Total Analysis Systems. 1. Introduction, Theory, and Technology", 74(12), 2623 (2002)
Auroux PA, Iossifidis D, Reyes DR, Manz A, Anal. Chem., "Micro Total Analysis Systems. 2. Analytical Standard Operations and Applications,", 74(12), 2637 (2002)
Jensen KF, AIChE J., 45(10), 2051 (1999)
Wang PC, DeVoe DL, Lee CS, Elctrophoresis, 22(18), 3857 (2001)
Beebe DJ, Mensing GA, Walker GM, Annu. Rev. Biomed. Eng., 4, 261 (2002)
Erickson D, Li D, Anal. Chim. Acta, 507(1), 11 (2004)
Barry R, Ivanov D, J. Nanobiotech., 2(2), 2 (2004)
Andeson H, Van den Berg A, Sens. Actuators B-Chem., 92(3), 315 (2003)
Andeson H, van den Berg A, Lab Chip, 4(2), 98 (2004)
Yi GR, Thorsen T, Manoharan VN, Hwang MJ, Jeon SJ, Pine DJ, Quake SR, Yang SM, Adv. Mater., 15(15), 1300 (2003)
Miguez H, Yang SM, Ozina GA, Appl. Phys. Lett., 81(14), 2493 (2002)
Chabinyc ML, Wong WS, Paul KE, Street RA, Adv. Mater., 15(22), 1903 (2003)
