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Received October 31, 2007
Accepted January 7, 2008
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태양전지용 폴리실리콘 제조
Preparation of Polysilicon for Solar Cells
한국화학연구원 신화학연구단, 305-343 대전시 유성구 장동 100
Advanced Chem-Tech Division, Korea Research Institute of Chemical Technology, 100 Jang-dong, Yuseong-gu, Daejeon 305-343, Korea
Korean Chemical Engineering Research, February 2008, 46(1), 37-49(13), NONE Epub 28 February 2008
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Abstract
태양전지 기판의 원료인 폴리실리콘의 공급부족은 태양광발전산업의 비약적인 발전에 있어 최대 걸림돌이 되고 있다. 태양전지 제조에 충분한 순도로 폴리실리콘을 값싸게 제조할 수 있게 하는 공정기술의 개발은 태양광발전의 가격 경쟁력과 활용범위를 크게 증가시키는 중요한 계기가 될 수 있다. 본 총설에서는 태양전지용 폴리실리콘 제조를 위해 현재 이용 가능한 기술들을 정리해보고, 최근에 주목받고 있는 유동층 석출공정기술과 관련하여 응용범위 확대를 가로막고 있는 주요 기술적 장애요인에 대하여 중점적으로 소개하고자 한다.
Recent rapid progress in the photovoltaic industry has seriously been retarded by limited supply of polysilicon used as the feedstock for silicon wafer-based solar cells. It is thus believed that development of a competitive process for preparing polysilicon with the quality required for solar cells can greatly enhance the competitiveness and extent of the photovoltaic application. Technologies currently available for preparing the silicon feedstock are reviewed with the recent fluidized bed silicon deposition process being discussed in more details in terms of key technical barriers.
Keywords
References
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Barker TH, US Patent No. 4,585,643 (1986)
Gansauge J, Muschi J, Freudlsperger H, US Patent No. 4,176,710 (1979)
Noda S, Tanabe K, Yahiro T, Osawa T, Komiyama H, J. Electrochem. Soc., 151(6), C399 (2004)
Ruff K, US Patent No. 5,063,040 (1991)
Braunsperger J, Lang W, Zainer T, US Patent No. 4,130,632 (1978)
Blocher JM, Browning MF, US Patent No. 4,117,094 (1978)
Kroupa MG, 201-208, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21 (2002)
Union Carbide Corp., “Low Cost Solar Array Project-Feasibility of the Silane Process for Producing Semiconductor-Grade Silicon,” JPL contract No. 954334, Final Report, June (1979)
Mui JYP, Seyferth D, JPL Contract No. 955 382, Final Report, April 15 (1981)
Block HD, Mleczko L, Leimkuehler HJ, Weber R, Werner K, Schwanke D, Schaefer JP, Wagner G, US Patent No. 6,887,448 (2005)
Block HD, Leimkuehler HJ, Mueller D, Schaefer JP, Ronge G, US Patent No. 6,905,576 (2005)
Sundermeyer W, 265-270, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G., and Tuset, J.K. (Eds), Silicon for the Chemical Industry V, Tromsoe, Norway, May 29-June 2 (2000)
Padovani FA, Miller MB, Moore JA, Fowler JH, June MN, Mattews JD, Morton TR, Stotko NA, Palmer LB, US Patent No. 4,092,446 (1978)
Weigert W, US Patent No. 4,165,363 (1979)
Weigert W, US Patent No. 4,217,334 (1980)
Roever I, Acker J, Bohmhammel K, Roewer G, Hesse K, Paetzold U, 209-224, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21 (2002)
Roewer G, Paetzold U, Walter H, US Patent No. 5,716,590 (1998)
Sarma KR, Rice MJ, US Patent No. 4,309,259 (1982)
Ingle WM, Preffley MS, Setty HSN, US Patent No.4,526,769 (1985)
Hamster H, Koeppl F, US Patent No. 4,536,642 (1985)
Bakay CJ, US Patent No. 3,968,199 (1976)
Litteral CJ, US Patent No. 4,113,845 (1978)
Breneman WC, US Patent No. 4,676,967 (1987)
Jung IN, Cho KD, Lim JC, Yoo BR, US Patent No. 4,701,430 (1987)
Block HD, Mleczko L, Bulan A, Weber R, Buchholz S, Sill T, US Patent No. 6,852,301 (2005)
Keck DW, Nagai K, Yatsurugi Y, Morihara H, Izawa J, US Patent Nos. 5,382,419 and 5,478,396(1995) and 5,545,387 (1996)
Weidhaus D, Hayduk A, US Patent No. 7,029,632 (2006)
Wacker Chemie AG FACT BOOK 2007, Investor Relations, July (2007)
Solarbuzz News, “Wacker Builds Granular Solar Polysilicon Plant,” July 16(2007); http://www.solarbuzz.com/News/NewsEUMA175.htm.
Weidhaus D, Schindlbeck E, Hesse K, Silicon for the Chemical Industry VII, MS Trollfyord, Tromso-Bergen, Norway, Sept. 21-24 (2004)
Weidhaus D, Crossmann I, Schreieder F, US Patent Application Publication No. 0135986 (2005)
Weidhaus D, Schindlbeck E, Hesse K, Domberger E, 20th European Photovoltaic Solar Energy Conference, Proceedings 623-626, June 6-10, Barcelona, Spain (2005)
Kim HY, US Patent No. 6,395,248 (2002)
Kim HY, Park YK, US Patent No. 6,541,377 (2003)
Kim HY, Yoon KK, Park YK, Choi WC, Korea Patent 10-0961284 (2007)
Kim HY, Yoon KK, Park YK, Choi WC, Korea Patent 10-0756310 (2007)
Kim HY, Yoon KK, Park YK, Choi WC, Kim HK, Proceedings, 256-263, GreenSarang Workshop, COEX, Seoul, Oct. 5, 2007
Age S, US Patent 5,077,028 (1991)
Schreieder F, Kim HY, US Patent 6,007,869 (1999)
Hunt LP, Sirtl E, J. Electrochem. Soc.: Solid-State Sci. & Tech., 119(12), 1741 (1972)
Lund CP, Zhang W, Jennings PJ, Singh P, 249-263, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G., and Tuset, J. K. (Eds), Silicon for the Chemical Industry V, Tromsoe, Norway, May 29-June 2 (2000)
REC Group, “Analyst Silicon Field Trip,” March 28 (2007)
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DeLuca JP, US Patent No. 5,910,295 (1999)
Hsu G, Hogle R, Rohatgi N, Morrison A, J. Electrochem. Soc.: Solid-State Sci. & Tech., 131(3), 660 (1984)
Farrow RFC, J. Electrochem. Soc.: Solid-State Sci. & Tech., 121(7), 899 (1974)
Iya SK, Flagella RN, DiPaolo FS, J. Electroanal. Chem. Soc. : Solid-State Sci. & Tech., 129(7), 1531 (1982)
Caussat B, Hemati M, Couderc JP, Powder Technol., 101(1), 43 (1999)
Caussat B, Hemati M, Couderc JP, Chem. Eng. Sci., 50(22), 3615 (1995)
Caussat B, Hemati M, Couderc JP, Chem. Eng. Sci., 50(22), 3625 (1995)
Kouadri-Mostefa S, Serp P, Hemati M, Caussat B, Powder Technol., 120(1-2), 82 (2001)
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Allen RH, Boone JE, US Patent No. 5,326,547 (1994)
Flagella RN, US Patent No. 5,139,762 (1992)
Flagella RN, US Patent No. 4,906,441 (1990)
Gautreaux MF, Lawrence WW, Daniels GA, Hughmark GA, US Patent No. 4,981,102 (1991)
Clary DW, Wikman AO, US Patent No. 5,260,538 (1993)
Lord SM, Milligan RJ, US Patent No. 5,798,137 (1998)
Lord SM, Milligan RJ, US Patent No. 5,810,934 (1998)
Koenig T, Pfaffelhuber M, Herold H, Holdenried G, Mleczko L, US Patent No. 6,849,244 (2005)
Mueller A, Sonnenschein R, Sill T, Goelz A, Adler P, 20th European Photovoltaic Solar Energy Conference, Proceedings 623-626, June 6-10, Barcelona, Spain (2005)
Runyan WR, Silicon Semiconductor Technology, 6-15, McGraw-Hill Book Co., N.Y. (1965)
Geerligs B, 3rd Solar Silicon Conference, Munich, April 3 (2006)
Nepomnyaschikh AI, Fedosenko VA, Eremin VP, Krasin BA, 17-21, in Oye, H. A., Rong, H. M., Nygaard, L., Schussler, G. and Tuset, J. Kr. (Eds), Silicon for the Chemical Industry VI, Loen, Norway, June 17-21 (2002)
Dehloff C, 3rd Solar Silicon Conference, Munich, April 3 (2006)
Dow Corning Product Highlight, “A Breakthrough in Silicon Feedstock: Dow Corning PV 1101 SoG Silicon,” http://www.dowcorning. com/content/solar/solarmetal/default.asp
