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Language: korean

Conflict of Interest: In relation to this article, we declare that there is no conflict of interest.

Publication history: Received February 11, 2010
Accepted April 5, 2010

This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

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수정진동자를 이용한 박막의 흡착 측정

Adsorption Measurement of Thin Film Using a Quartz Crystal Resonator

김병철 박정우 김영한^†

Byoung Chul Kim Jung Woo Park Young Han Kim^†

동아대학교 화학공학과, 604-714 부산시 사하구 하단동 840번지

Department of Chem. Eng., Dong-A Univ., 840 Hadan-dong, Saha-gu, Busan 604-714, Korea

Korean Chemical Engineering Research, June 2010, 48(3), 405-408(4), NONE Epub 5 July 2010

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Abstract

박막의 흡착특성인 흡착표면적과 세공크기를 수정진동자를 이용하여 측정하는 새로운 방법을 제안하였으며 그 성능을 조사하였다. 수정진동자의 표면에 박막을 직접 제조하여 흡착능을 측정함으로써 박막상태에서 흡착능을 측정하였으며, 이산화탄소를 피흡착 기체로 사용하여 측정이 용이하도록 하였다. 흡착측정 결과로부터 흡착면적은 양호하게 측정이 가능함을 알 수 있었으나, 세공크기의 측정에는 다소 오차가 발생하였다. 간단히 구할 수 있는 이산화탄소를 이용하여 상온에서 박막상태 흡착제의 흡착능 측정이 가능함을 제시하였다.

A technique to measure the adsorption characteristic of surface area and pore size of a ceramic thin film is proposed, and its performance is examine. The thin film is fabricated directly on the resonator surface to measure the adsorption capacity of the film as it is, and using carbon dioxide makes the measurement easy. The results indicates that the measured surface area is satisfactory, while the pore size has some error. It is suggested that readily available carbon dioxide can be used to determine adsorption capacity of thin film at room temperature.

Keywords

Adsorption Characteristic Determination Quartz Crystal Resonator TEOS

References

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