기상으로 전달된 Ti 전구체가 열 플라즈마에서 고순도의 결정질 코어-TiO2로 합성됨과 동시에 기판에 바로 증착시킬 수 있는 공정을 제시한다. 제조된 코어-TiO2는 외부에 노출되지 않는 상태에서 원자층증착법(Atomic Layer Deposition, ALD)에 의하여 Al2O3로 코팅된다. 코어-TiO2와 코팅된 쉘-Al2O3의 형태학적 특징은 transmission electron microscope (TEM) 및 transmission electron microscope - energy dispersive spectroscopy (TEM-EDS)를 통해 분석하였다. 제조된 코어-TiO2/쉘-Al2O3 나노입자의 전기적 특성은 염료감응 태양전지(dye-sensitized solar cell, DSSC)의 작동 전극에 적용하여 평가하였다. Dynamic light scattering system (DLS), scanning electron microscope (SEM), X-ray Diffraction (XRD)을 통하여 코어-TiO2의 평균입도, 성장속도 및 결정구조의 무게분율을 분석한 결과, 평균입도는 17.1 nm, 코어박막의 두께는 20.1 μm이고 주 결정구조가 Anatase로 증착된 코어-TiO2/쉘-Al2O3 나노입자를 적용한 DSSC가 기존의 페이스트 방식으로 제작한 DSSC보다 더 높은 광효율을 보여준다. 기존의 페이스트방식을 활용한 DSSC의 에너지변환효율 4.99%에 비하여 선택적으로 조절된 코어-TiO2/쉘-Al2O3 나노입자를 작동전극으로 사용한 경우가 6.28%로 26.1% 더 높은 광효율을 보여준다.

This study proposed the fabrication and deposition of high purity crystalline core-TiO2/shell-Al2O3 nanoparticles. Morphological properties of core-TiO2 and coated shell-Al2O3 were confirmed by transmission electron microscope (TEM) and transmission electron microscope - energy dispersive spectroscopy (TEM-EDS). The electrical properties of the prepared core-TiO2/shell-Al2O3 nanoparticles were evaluated by applying them to a working electrode of a Dye-Sensitized Solar Cell (DSSC). The particle size, growth rate and the main crystal structure of core-TiO2 were analyzed through dynamic light scattering system (DLS), scanning electron microscope (SEM) and X-ray diffraction (XRD). The core-TiO2, which has a particle size of 17.1 nm, a thin film thickness of 20.1 μm and a main crystal structure of anatase, shows higher electrical efficiency than the conventional paste-based dye-sensitized solar cell (DSSC). In addition, the energy conversion efficiency (6.28%) of the dye-sensitized solar cell (DSSC) using the core-TiO2/shell- Al2O3 nanoparticles selectively controlled to the working electrode is 26.1% higher than the energy conversion efficiency (4.99%) of the dye-sensitized solar cell (DSSC) using the conventional paste method.

Core/shell nanoparticle Nanoparticle Fabrication Nanoparticle deposition Microwave Plasma Dye-sensitized solar cell

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