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- In relation to this article, we declare that there is no conflict of interest.
- Publication history
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Received January 13, 2022
Accepted February 23, 2022
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This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/bync/3.0) which permits
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기-액 하이브리드 대기압 플라즈마 반응기 제작 및 특성 분석
Fabrication and Characterization of Gas-liquid Hybrid Reactor Equipped with Atmospheric Pressure Plasma
강원대학교 화공·생물공학부, 24341 강원도 춘천시 강원대학길1
Division of Chemical Engineering and Bioengineering, Kangwon National University, Chuncheon, Kangwon, 24341, Korea
wglee@kangwon.ac.kr
Korean Chemical Engineering Research, August 2022, 60(3), 452-458(7), 10.9713/kcer.2022.60.3.452 Epub 18 July 2022
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Abstract
3가지 종류의 기-액 하이브리드 수평형, 수직형 그리고 needle-to-cylinder형 플라즈마 반응기가 제작되었다. 이들 반 응기를 통하여 대기압 플라즈마 방전에서 발생하는 반응 활성종 생성과 전극 내의 전위차를 통한 세정성분의 기-액 활 성화 반응을 일으키는 고효율 친환경 기반의 세정 개념을 제시하였다. 세정성능에 대한 효율성을 비교한 결과, needleto- cylinder형 반응기가 가장 우수한 특성을 가졌다. 본 연구를 통해 기-액 하이브리드 대기압 플라즈마 반응기가 반도 체 공정 등 초정밀 세정공정에 응용 가능성이 있음을 확인하였다.
Three types of gas-liquid hybrid horizontal, vertical and needle-to-cylinder plasma reactors were fabricated. Through these reactors, a high-efficiency, eco-friendly cleaning concept that generates reactive active species generated in atmospheric plasma discharge and gas-liquid activation reaction of cleaning components through the potential difference within the electrode was presented. As a result of comparing the efficiency for cleaning performance, the needle-to-cylinder type reactor had the best characteristics. Through this study, it was confirmed that the gas-liquid hybrid atmospheric pressure plasma reactor has the potential to be applied to ultra-precision cleaning processes such as semiconductor processes.
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References
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Lu J, Garland J, Pettit C, Babu S, Roy D, J. Electrochem. Soc., 151(10), G717 (2004)
